发明名称 Method of producing and guiding intensive, large-area ion, electron and x-ray beams
摘要 A method for the repeatable generation and guidance of intensive, large-area ion, electron and x-ray beams, with the beam guidance being effected already in the beam generator by means of operationally variable, magnetic and electric fields and variable magnetic correction fields, wherein the beam guidance fields are generated by the beam current itself and the magnetic correction fields by the current source associated with the beam generator.
申请公布号 US4904873(A) 申请公布日期 1990.02.27
申请号 US19890315579 申请日期 1989.02.27
申请人 KERNFORSCHUNGSZENTRUM KARLSRUHE GMBH 发明人 KUEHN, WERNER
分类号 H05G1/00;H01J27/14;H01J37/06;H01J37/141;H01J37/147;H01L21/027 主分类号 H05G1/00
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