FORMATION OF PATTERN,申请号JP19880209140-传众专利搜索

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发明名称	FORMATION OF PATTERN
摘要
申请公布号	JPH0258222(A)	申请公布日期	1990.02.27
申请号	JP19880209140	申请日期	1988.08.23
申请人	OKI ELECTRIC IND CO LTD	发明人	HOUGEN HIROSHI;AIZAWA OSAMU
分类号	H01L21/302;H01L21/3065;H01L21/3205	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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