Schottky gate field effect transistor

摘要

In a Schottky gate field effect transistor comprising a channel formed by doping donor ions in the surface layer of a compound semiconductor (e.g., GaAs) substrate and performing heat treatment, a Schottky gate electrode formed over the channel, and a source electrode and a drain electrode formed on the respective sides of the Schottky gate electrode, a first and a second regions are formed by implantation of ions which are to become carrier killers, to have respective concentration peaks shallower and deeper than the concentration peak of the donor ions of the channel.