Railway carrier apparatus for semiconductor wafers
摘要
A railway carrier apparatus for semiconductor wafers which are contained in a wafer cassette is disclosed. This railway carrier apparatus includes: a carrier for carrying the wafer cassette; a guide rail, disposed along a line of travel of the carrier, for supporting the carrier to guide the carrier along the line of travel; and a drive mechanism for driving the carrier along the line of travel. The carrier includes; a carrier body slidably connected to the guide rail for movement along the guide rail; and a bedplate member, mounted on the carrier body, for supporting the wafer cassette on its upper face. The upper face of the bedplate member is inclined with respect to a horizontal plane in such a manner that one of its opposite side edges is positioned at a higher level than the other side edge.
申请公布号
US4903610(A)
申请公布日期
1990.02.27
申请号
US19870126475
申请日期
1987.11.25
申请人
SHINKO ELECTRIC CO., LTD.;SHIMIZU CONSTRUCTION CO., LTD.