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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0258368(A)
申请公布日期
1990.02.27
申请号
JP19880208331
申请日期
1988.08.24
申请人
HITACHI LTD
发明人
ITO KATSUHIKO
分类号
H01L21/76;H01L27/08
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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