| 摘要 |
<p>PURPOSE:To prevent a gas from being generated from a connecting surface, when a plurality of linear gas bearings used in a vacuum are to be connected, by providing a stepped part to the outer part of the bearing at a mating face of each linear gas bearing and filling this stepped part with a sealant after each linear gas bearing is connected, thereby improving flatness and parallelism of the outer surface of the bearing. CONSTITUTION:A stepped part A is provided to an end surface of each connecting surface of housings 2 and 3, which constitute a plurality of linear gas bearings. After the housing 2 and the housing 3 are connected, the outer surface is machined to the predetermined accuracy. After this machining work, this stepped part A is filled with a sealant 8. Owing to this sealant 8 used for filling, the gas is prevented from being generated from the connecting surface, thereby enabling this bearing to be used in a vacuum. With this contrivance, since the outer surface can be machined after the housings are connected, flatness and parallelism of the outer surface of the bearing can be improved.</p> |
