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发明名称
摘要
申请公布号
JPH0231151(U)
申请公布日期
1990.02.27
申请号
JP19880108724U
申请日期
1988.08.19
申请人
发明人
分类号
H01L21/285;H01L29/41;(IPC1-7):H01L29/44
主分类号
H01L21/285
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