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发明名称
摘要
申请公布号	JPH0229522(U)	申请公布日期	1990.02.26
申请号	JP19880107737U	申请日期	1988.08.16
申请人		发明人
分类号	C23C14/22;C23C14/00;H01L21/203;H01L21/31;(IPC1-7):H01L21/31	主分类号	C23C14/22
代理机构		代理人
主权项
地址

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