| 摘要 |
<p>PURPOSE:To improve the sensitivity as a sensor and realize the high response speed by employing a formation film such as a phosphorate compound film or a phosphorate film as a humidity-sensitive part. CONSTITUTION:A phosphorate film is formed on a metal substrate 6 as a humidity-sensitive part 1 to provide an electrode 2. A first electrode plate having the electrode 2 is held inside a fold second electrode plate having a facing electrode 3 and ventilation holes 4 for contact and fixed by a fixing metal appliance 5 to constitute a humidity sensor. A formation film is deposited on the surface of the metal substrate by an electrolytic treatment on a non- electrolytic treatment and the formation film is used as the humidity-sensitive part. With this constitution, the manufacturing cost can be saved, the adhesiveness between the element and the substrate and the sensitivity can be improved and the high response speed can be realized.</p> |
