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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH0254963(A)
申请公布日期
1990.02.23
申请号
JP19880206982
申请日期
1988.08.19
申请人
SEIKO EPSON CORP
发明人
KATO JURI
分类号
H01L21/762;H01L21/02;H01L21/314;H01L21/336;H01L21/76;H01L27/12;H01L29/786
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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