BROBING,申请号JP19880205457-传众专利搜索

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发明名称	BROBING
摘要
申请公布号	JPH0254544(A)	申请公布日期	1990.02.23
申请号	JP19880205457	申请日期	1988.08.18
申请人	TOKYO ELECTRON LTD	发明人	KARASAWA WATARU
分类号	H01L21/66;G01R31/26	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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