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经营范围
发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH0254762(A)
申请公布日期
1990.02.23
申请号
JP19880205156
申请日期
1988.08.18
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
YASUI HIDEAKI;TSUDA YOSHIYUKI;KODERA KOICHI;MUKAI YUJI
分类号
C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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