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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH0252469(A)
申请公布日期
1990.02.22
申请号
JP19880204338
申请日期
1988.08.17
申请人
TOSHIBA CORP
发明人
MIZUNO TOMOHISA;SAWADA SHIZUO
分类号
H01L29/78;H01L21/336
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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