| 摘要 |
PURPOSE:To obtain a titled device for uniformly heating a cylindrical base body through a mandrel, by making the mandrel tightly sealed up with a heating medium pass through the cylindrical base body being an object to be vapor- deposited, and constituting the heating medium so as to be heated by a heater. CONSTITUTION:To a mandrel 1, a cylindrical base body 10 being an object to be vapor-deposited is installed so as to be rotatable in one body, and a vacuum chamber which is not shown in the figure is set to a prescribed degree of vacuum. Subsequently, a heating medum 2 in the mandrel 1 is detected 4 by a heater 5, is heated up to a prescribed temperature by watt density by which the heating medium 2 is not thermal-cracked, and the heating medium 2 is evaporated. In such a state, the base body 10 is rotated together with the mandrel 1 by a rotary shaft 7, also a vapor-deposition substance (m) is evaporated by heating a heating crucible 12, and the vapor-deposition substrance (m) is vapor- deposited to uniform coating film thickness on the outside surface of the base body 10. In this regard, as for the heating medium 2 and the vapor-depositin substance (m), for instance, diphenyl, and MgF2, ClF3, etc. are used, respectively. |
