PLASMA ETCHING APPARATUS,申请号JP19880202769-传众专利搜索

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发明名称	PLASMA ETCHING APPARATUS
摘要
申请公布号	JPH0252427(A)	申请公布日期	1990.02.22
申请号	JP19880202769	申请日期	1988.08.16
申请人	TOKUDA SEISAKUSHO LTD	发明人	SHIROSAKI TOMOHIDE
分类号	C23F1/08;H01L21/302;H01L21/3065	主分类号	C23F1/08
代理机构		代理人
主权项
地址

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