| 摘要 |
PURPOSE:To improve the dry etching durability of the subject composition against an oxygen gas by incorporating a novolak resin contg. a bisphenol having a siloxane binding and a bisazide compd. in the composition. CONSTITUTION:An alkali-soluble novolak resin is obtd. by allowing it to react at least one of a siloxane compd. selected from 1,3-bis(m-hydroxyphenyl) tetramethyldisiloxane, and 1,3-bis(m-hydroxyphenyl)-1,3-dimethyl-1,3-diphenyl disiloxane, etc., with aldehydes, or a mixture of at least one of a siloxane compd. selected from 1,3-bis(m-hydroxyphenyl) tetramethyldisiloxane 1,3-bis(m- hydroxyphenyl)-1,3-dimethyl-1,3-diphenyldisiloxan-e, etc., and another phenols with the aldehydes. The alkali-soluble novolak resin and the bisazide compd. are incorporated in the composition. Thus, the durability of the composition is improved. |
