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发明名称
Process for manufacturing silicon-germanium alloys
摘要
申请公布号
GB2221923(A)
申请公布日期
1990.02.21
申请号
GB19890012077
申请日期
1989.05.25
申请人
* KOMATSU ELECTRONIC METALS CO. LTD
发明人
SHINJI * MARUYA;TORU * TAKAHASHI;JUNJI * IZAWA;YOSHIFUMI * YATSURUGI
分类号
C23C16/30;C23C16/22;H01L21/205;H01L35/22;H01L35/34
主分类号
C23C16/30
代理机构
代理人
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