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发明名称
SCANNING TYPE ELECTRON MICROSCOPE FOR SIZE MEASUREMENT
摘要
申请公布号
JPH0251833(A)
申请公布日期
1990.02.21
申请号
JP19880201965
申请日期
1988.08.15
申请人
TOSHIBA CORP
发明人
OMATA SATOSHI
分类号
H01J37/147
主分类号
H01J37/147
代理机构
代理人
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