发明名称 X-RAY INSPECTION DEVICE
摘要 PURPOSE:To enable nondestructive inspection by X rays and the outward appearance inspection for a object by arranging a camera for the outward appearance inspection successively together with an X-ray camera. CONSTITUTION:The object 20 is arranged between the X-ray tube 11 of an X-ray generation device and an image sensor 40 as the X-ray camera for X-ray radiography to perform the X-ray radiography. Further, a vidicon 300 is fixed on one flank side of the image sensor 40 as the camera for the outward appearance inspection and a fiber lighting system 304 for irradiating the object 20 with light from a light source outside the device so as to radiograph an outward appearance image of the subject 200 by the vidicon 300 is arranged adjacently to the image sensor 40. Further, mirrors 302 and 303 which have mirror surfaces slantingly upward and downward at 45 deg. are arranged right below the vidicon 300 so as to guide the reflected light of the illumination light from the object 20 to the vidicon 300. Consequently, the nondestructive inspection of the object is performed by observing the X-ray image and a defect place is grasped by observing an outward appearance shape.
申请公布号 JPH0252246(A) 申请公布日期 1990.02.21
申请号 JP19880202967 申请日期 1988.08.15
申请人 TOKYO ELECTRON LTD 发明人 EBIHARA AKIRA
分类号 G01N23/04;H05K13/08 主分类号 G01N23/04
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