发明名称 POSITIVE TYPE RADIOSENSITIVE MIXTURE AND RADIOSENSITIVE COPYING MATERIAL CONTAINING SAID COMPOUND
摘要 PURPOSE: To make a radiation sensitive mixture usable for a lithographic printing plate having high printing ability or as a heat resistant photoresist by incorporating a combination of a high mol.wt. binder soluble in an aq. alkali soln. but insoluble in water with specified compds. CONSTITUTION: This radiation sensitive mixture contains a combination of a high mol.wt. binder soluble in an aq. alkali soln. but insoluble in water with 1,2-quinone diazide or a compd. forming a strong acid when exposed to chemical rays and a compd. contg. a cleavable C-O-C bond. A polymer having units represented by formula I is contained as the binder. In the formula I, R1 is H, halogen, etc., each of R2 -R4 is H, alkyl, etc., each of R5 -R7 is H, halogen, etc., X is a group of atoms required to form a carbocyclic arom. ring and (n) is 1, 2 or 3. This mixture is usable as a photoresist or for lithography.
申请公布号 JPH0252349(A) 申请公布日期 1990.02.21
申请号 JP19890154797 申请日期 1989.06.19
申请人 HOECHST AG 发明人 ANDOREASU ERUZETSUSAA;BUERUNAA FURASU;DEIITAA MOORU
分类号 G03F7/022;G03F7/004;G03F7/023;G03F7/032;G03F7/039;H01L21/027;H01L21/30 主分类号 G03F7/022
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