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发明名称
FORMATION OF AL FILM BY CVD
摘要
申请公布号
JPH0250964(A)
申请公布日期
1990.02.20
申请号
JP19880201378
申请日期
1988.08.12
申请人
CANON INC
发明人
SUZUKI NOBUMASA;YAMAGAMI ATSUSHI
分类号
C23C16/12;C23C16/44;C23C16/448
主分类号
C23C16/12
代理机构
代理人
主权项
地址
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