CLEANING METHOD OF EQUIPMENT FOR FORMING FILM MADE OF CARBON OR MATERIAL MAINLY COMPOSED OF CARBON,申请号JP19880202534-传众专利搜索

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发明名称	CLEANING METHOD OF EQUIPMENT FOR FORMING FILM MADE OF CARBON OR MATERIAL MAINLY COMPOSED OF CARBON
摘要
申请公布号	JPH0250985(A)	申请公布日期	1990.02.20
申请号	JP19880202534	申请日期	1988.08.11
申请人	SEMICONDUCTOR ENERGY LAB CO LTD	发明人	ITO KENJI;AOYANAGI OSAMU
分类号	C23C16/44;C23F4/00	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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