发明名称 SPIN CASTABLE MIXTURE USABLE FOR FORMING CONTRAST INTENSIFYING LAYER FOR FAR ULTRAVIOLET RAYS
摘要 PURPOSE: To ensure superior declaring characteristics by incorporating 100 pts.wt. inert solvent, 2-20 pts.wt. inert org. binder and 2-20 pts.wt. specifiedα-alkyl-N-alkylnitron. CONSTITUTION: One hundred pts.wt. inert solvent, 2-20 pts.wt. inert org. binder and 2-20 pts.wt. specifiedα-alkyl-N-alkylnitron represented by formula I are incorporated. In the formula I, R is H or 1-8C alkyl, X is H or a univalent electron attractive group selected from among carboalkoxy, acyl and oxirane and Y is H or a univalent aliphatic group. Superior decoloring characteristics can be ensured.
申请公布号 JPH0250162(A) 申请公布日期 1990.02.20
申请号 JP19880192590 申请日期 1988.08.01
申请人 HARUZU AMERICA INC 发明人 GEIRII CHIYAARUZU DEIBISU
分类号 G03F7/095;G03F7/09;G03F7/26;G09B9/32;H01F1/153;H01L21/027;H01L21/30 主分类号 G03F7/095
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