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发明名称	THIN FILM FORMING DEVICE
摘要
申请公布号	JPH0250968(A)	申请公布日期	1990.02.20
申请号	JP19880199648	申请日期	1988.08.10
申请人	SUMITOMO ELECTRIC IND LTD	发明人	TOMIKAWA TADASHI;FUJITA NOBUHIKO
分类号	C23C16/50;H01L21/205;H01L21/31	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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