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经营范围
发明名称
Plasma apparatus
摘要
申请公布号
US4902934(A)
申请公布日期
1990.02.20
申请号
US19880192130
申请日期
1988.05.10
申请人
SUMITOMO METAL INDUSTRIES, LTD.
发明人
MIYAMURA, TADASHI;SUGAWARA, SHIGEO
分类号
H01L21/302;H01J37/32;H01L21/00;H01L21/205;H01L21/3065;H01L21/31;H01L21/677;H05H1/46
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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