Pressure sensor having means for electromagnetically shielding resistors

摘要

The invention relates to a pressure sensor including a metallic housing having an open end with an opening, a ceramic diaphragm accommodated within the housing such that the diaphragm is exposed at its one major surface to a pressure of a fluid in an external space through the opening of the housing, and resistors formed integrally on the diaphragm. The electrical resistance of the resistors varies with the pressure acting on the ceramic diaphragm, whereby the pressure is determined by the electrical resistance. An electromagnetic shielding member is disposed within the metallic housing such that the shielding member is positioned between the resistor or resistors and the open end of the metallic housing. The shielding member is adapted to protect the resistors from an electromagnetic wave in the external space.