| 摘要 |
PURPOSE:To sharply improve film breakdown strength (leakage currents) so as to contribute to miniaturization and low loss advancement by forming an oxide film on the surface of a valve acting metallic electrode, and sticking organic metallic salt such as alkoxide, etc., onto the oxide film, and heating it in the wet atmosphere so as to form a solid electrolyte. CONSTITUTION:Though solid electrolyte excellent in heat resistance is formed by applying solution in which organic metallic salt such as alkoxide, etc., is dissolved in xylene, or the like onto the surface of a valve acting metallic electrode consisting of aluminum foils treated by chemical conversion, and doing heat treatment after setting, steam is sent in at the time of formative reaction when metallic alcoholate transforms into a metallic oxide on a dielectric film so as to make the metallic oxide to be formed a one which contains crystal water to prevent damage and deterioration of the dielectric film. |
