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发明名称
SEMICONDUCTOR DEVICE FOR MANUFACTURE THEREOF
摘要
申请公布号
JPH0246733(A)
申请公布日期
1990.02.16
申请号
JP19880197116
申请日期
1988.08.09
申请人
TOSHIBA CORP
发明人
TAKAYANAGI MARIKO
分类号
H01L29/73;H01L21/20;H01L21/263;H01L21/331
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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