| 摘要 |
<p>PURPOSE: To highly accurately calculate velocity of fluid by measuring temperature increase of a sensor exceeding environmental temperature of flowing fluid and calculating the velocity of fluid from a measured value. CONSTITUTION: A temperature sensor 11 is used as a mass flow meter for measuring velocity of fluid. When electric power is supplied to the sensor 11 from a power source, heat is generated from the sensor 11. Here, a heat sink 25 is provided in flow at right angles to the flow of fluid and just in front of the sensor 11. The power is supplied to the sensor 11, and thermal flux flowing in the heat sink 25 is generated from the sensor 11. At this time fluid modulates the thermal flux, temperature of the sensor 11 is measured with a measuring circuit 23, and the velocity of fluid is calculated from the measured value.</p> |
