Installation for handling and treating contamination-sensitive objects, such as semiconductor parts (wafers) or similar products

摘要

An installation for handling and treating contamination-sensitive objects, such as semiconductor parts (wafers) or similar products under clean-room conditions has at least one clean-room area, containing work surfaces, for treating the objects and an operator area with a lesser degree of cleanness, in which the objects are accommodated, handled and transported in cassettes or similar containers. In the operator area there is provided at least one mobile vehicle which has at least one substantially closed space with means for the ordered reception of a number of cassettes, this space being assigned a device, belonging to the vehicle, for permanently maintaining clean-room conditions in the vehicle space receiving the cassettes. In addition, means for introducing and removing cassettes into and from the vehicle space kept clean, while maintaining the clean-room conditions, are present on the vehicle, while the vehicle itself is adapted for the docking of its space kept clean with a transfer point of the clean-room area.