METHOD OF MANAGING PRODUCTION OF SEMICONDUCTOR WAFER AND WAFER CARRIER JIG FOR SUCH MANAGEMENT

摘要

PURPOSE:To make it possible to grasp progress of processes on the basis of a number of wafers by transferring an identification mark representing a treating process on a marginal region of a semiconductor wafer where products are not affected thereby. CONSTITUTION:Each time a semiconductor wafer 1 is treated in an exposure process, at least a mark indicating a type of products and a number of the wafer and a mark 3 indicating that the related process has been finished are put on a region close to an orientation flat 2 where chips on the wafer 1 for providing the products are not affected thereby. The identification mark 3 is transferred and engraved by photolithography. The transferred identification mark 3 is read in the following treating processes so that the semiconductor wafers 1 are identified on the basis of a number of wafers. In this manner, it is possible to indicate conditions of physical distribution and manufacture on the basis of a number of wafers as well as to manage working achievements and working results on the basis of a number of wafers.