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发明名称
TURBO MOLECULAR PUMP
摘要
申请公布号
JPH0242194(A)
申请公布日期
1990.02.13
申请号
JP19880190842
申请日期
1988.07.31
申请人
SHIMADZU CORP
发明人
NARITA KIYOSHI
分类号
F04D19/04
主分类号
F04D19/04
代理机构
代理人
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