发明名称 |
Apparatus for collecting wafers |
摘要 |
An apparatus for collecting wafers sliced from a semiconductor crystal rod, and the apparatus includes a primary mobile member, a secondary mobile member and a wafer collection assembly. The primary mobile member is movable toward and away from the crystal rod, and the secondary mobile member is mounted on the primary mobile member and is movable relative to the primary mobile member in a direction toward and away from the semiconductor crystal rod. The wafer collecting assembly is mounted on the second mobile member for collecting the wafers sliced from the semiconductor crystal rod.
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申请公布号 |
US4899719(A) |
申请公布日期 |
1990.02.13 |
申请号 |
US19880223512 |
申请日期 |
1988.07.22 |
申请人 |
MITSUBISHI KINSOKU KABUSHIKI KAISHA |
发明人 |
ABE, SEIICHI;SHIRATORI, YOSHITAKA;SAKAMOTO, TOMOYOSHI |
分类号 |
B28D5/00;B28D7/04;H01L21/677;H01L21/687 |
主分类号 |
B28D5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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