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发明名称
FORMATION OF PATTERN
摘要
申请公布号
JPH0240914(A)
申请公布日期
1990.02.09
申请号
JP19880191624
申请日期
1988.07.30
申请人
NEC CORP
发明人
YAMANAKA KOJI
分类号
H01L21/302;H01L21/027;H01L21/3065;H01L21/3205;H01L21/3213
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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