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发明名称
APPARATUS FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH0239424(A)
申请公布日期
1990.02.08
申请号
JP19880189235
申请日期
1988.07.28
申请人
NEC CORP
发明人
SASAKI YASUSHI
分类号
B08B17/02;H01L21/22;H01L21/31
主分类号
B08B17/02
代理机构
代理人
主权项
地址
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