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发明名称
LSI FORM SIMULATING METHOD
摘要
申请公布号
JPH0239375(A)
申请公布日期
1990.02.08
申请号
JP19880189853
申请日期
1988.07.29
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
TAZAWA SATOSHI;MATSUO SEITARO;SAITO KAZUYUKI;YOSHII AKIRA
分类号
H01L21/20;G06F17/50;H01L21/00;H01L21/302;H01L21/3065
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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