| 摘要 |
PURPOSE: To increase laser energy, by connecting at least two nearly equal modules by using a corner intermediate flange wherein a laser beam can penetrate at the corners or a connection flange, and connecting two gas pipe lines of the different modules, in the state of straight line. CONSTITUTION: A laser is constituted of two equipments of lasers. In this case, a unit (Baneinheit) shown left under is connected to the same unit shown right upper by using a connection flange 21<1> . The unit shown left under lacks a corner intermediate flange 17. In the unit shown right upper, not only one mirror 22 for total reflection but also a detachable mirror 23 are not arranged. Insted of them, a ray path penetrates the connection flange 21<1> straight at the position accurately keeping 90 deg.. Rays intersect at the center of the connection flange 21<1> . By using a plurality of units, a laser whose output is increased can be obtained without enlarging a base surface. |
