| 摘要 |
PURPOSE:To achieve a higher inspection efficiency and a higher inspection accuracy by scanning an inspection area on a reticle simultaneously half by half in parallel by respective scanning optical systems. CONSTITUTION:Scan signals SC1 and SC2 from objective lenses 11 and 12 are quantized with the respective pattern signal converting sections 13 and 14 to pattern data PD1 and PD2 to be inputted into a comparison processing sections 15 and 16. Inspection data CD1 and CD2 are stored into inspection data storage sections 17 and 18 corresponding to inspection areas 3 and 4 of the lenses 11 and 12. The data are read out synchronizing the signals SC1 and SC2 to be inputted into the processing sections 15 and 16. then, when a difference exists between the data PD1 and PD2 and CD1 and CD2, difference signals DS1 and DS2 are outputted. Based on the signals, a defect signal DF is sent from a defect judging section 19. |
