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发明名称
MANUFACTURE OF COMPOUND SEMICONDUCTOR CRYSTAL
摘要
申请公布号
JPH0239441(A)
申请公布日期
1990.02.08
申请号
JP19880190408
申请日期
1988.07.28
申请人
FUJITSU LTD
发明人
MARUYAMA KENJI
分类号
H01L21/365;H01L21/36
主分类号
H01L21/365
代理机构
代理人
主权项
地址
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