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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0239429(A)
申请公布日期
1990.02.08
申请号
JP19880189504
申请日期
1988.07.28
申请人
MATSUSHITA ELECTRON CORP
发明人
ISHIKAWA KATSUYA
分类号
H01L21/302;H01L21/306;H01L21/3065;H01L21/768
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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