| 摘要 |
PURPOSE:To obtain the antireflection film having an excellent antireflection function and wear resistance by consisting said film of 4 layers and splashing titanium or its oxide in a base material direction and depositing titanium dioxide by evaporation on the plastic base material while heating the base material to a specific temp., thereby forming the 3rd layer. CONSTITUTION:A 1st layer has the function to improve the hardness of the antireflection film and to enhance the wear resistance and the layers to provide the antireflection effect are the remaining 2nd-4th layers. The 3rd layer is formed by the method of splashing the titanium or its oxide in the base material direction while irradiating the plastic base material with an oxygen ion beam in the state of heating the base to 50-120 deg.C to deposit the titanium dioxide by evaporation on the base material. Such 3rd layer is disposed between the 2nd layer consisting of a zirconium oxide-silicon dioxide film having a low refractive index and the 4th layer consisting of a silicon dioxide film having a low refractive index, by which the desired antireflection effect is obtd. The antireflection film having the excellent antireflection function and wear resistance is obtd. in this way. |
