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经营范围
发明名称
TREATING DEVICE
摘要
申请公布号
JPH0238576(A)
申请公布日期
1990.02.07
申请号
JP19880188680
申请日期
1988.07.27
申请人
TOKYO ELECTRON LTD
发明人
KAWANISHI YASUHIKO
分类号
C23C16/44;C23C16/455;C23C16/52;H01L21/205;H01L21/285;H01L21/302;H01L21/3065
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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