发明名称 |
Photosensitive agent,photosensitive resin composition containing same, and method of image formation using the composition. |
摘要 |
<p>A photosensitive agent which is an aromatic diazide compound of Formula (I), a photosensitive resin composition using the photosensitive agent which undergoes less swelling on developing with water and has good resolution, and an image formation method including coating the photosensitive resin composition on a substrate, exposure, and developing by an aqueous developing solution. <CHEM> e</p> |
申请公布号 |
EP0353666(A2) |
申请公布日期 |
1990.02.07 |
申请号 |
EP19890114025 |
申请日期 |
1989.07.28 |
申请人 |
TOYO GOSEI KOGYO CO., LTD. |
发明人 |
TOCHIZAWA, NORIAKI;KIKUCHI, HIDEO |
分类号 |
G03F7/008 |
主分类号 |
G03F7/008 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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