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发明名称
EPITAXIAL REACTOR
摘要
申请公布号
SU1541689(A1)
申请公布日期
1990.02.07
申请号
SU19847773505
申请日期
1984.07.30
申请人
TESLA NP
发明人
SLEZAK JIRZHI,CS;VESELY ZDENEK,CS;MIKISHKA JOSEF,CS
分类号
H01L21/205;C30B1/00;C30B35/00;H01L21/02
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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