发明名称 WIRE BONDING DEVICE
摘要 PURPOSE:To maintain the inside of opening of a press-pressure tool to a specified environment and prevent a lead frame and a wire from being oxidized by forming a gas-guiding path for guiding a reducing or inactive gas at the inner lead part of a semiconductor element and the lead frame exposed within the opening of the press-pressure tool. CONSTITUTION:A press-pressure tool 14, where a semiconductor element S mounted to a lead frame L and an opening for exposing an inner lead part 1 of the lead frame L are formed, has a gas-guiding path for guiding a reducing or inactive gas. Thus, when the press-pressure tool 14 fixes the heated lead frame L with press pressure, it can maintain the semiconductor element S exposed within the opening and the inner lead part I of the lead frame L to a specified environment. It achieves a reliable bonding with a stable and specified bonding strength without oxidizing the lead frame L or a wire W which is easy to be oxidized.
申请公布号 JPH0237732(A) 申请公布日期 1990.02.07
申请号 JP19880187847 申请日期 1988.07.27
申请人 TOSHIBA CORP 发明人 MORI IKUO;ATSUMI KOICHIRO
分类号 H01L21/60 主分类号 H01L21/60
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