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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH0236539(A)
申请公布日期
1990.02.06
申请号
JP19880185610
申请日期
1988.07.27
申请人
HITACHI LTD
发明人
TANIGAKI YUKIO
分类号
H01L21/3205;H01L21/336;H01L23/52;H01L29/78
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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