| 摘要 |
PURPOSE:To enhance an accuracy by forming a stage displacing mechanism of a supporting frame for coupling between both ends of a pair of bimorph type piezoelectric elements and a displacement distance transmitting arm, and laminating a plurality of stages of the mechanisms. CONSTITUTION:A positioning apparatus body 11 has an approximately rectangular stage 12 for placing a driven tower at a center and substantially rectangular frames 13-16 laminated at predetermined intervals on the periphery of the stage. Piezoelectric element attaching openings 17a-17b are formed on a pair of opposite wall faces of the first outer frame 13 along a direction X, and a pair of bimorph type piezoelectric elements 18a-18b are disposed oppositely at an interval in parallel at both ends of the stage 12 in the direction X. Protrusions 19a-19b are formed on at the frame 14 inside the frame 13, and a first stage displacing mechanism 20 for transmitting a displacing operation to the stage 12 is formed. Then, second-fourth mechanisms 24, 28, 32 are sequentially formed. Thus, the stage 12 can be moved in two directions. |
