| 摘要 |
<p>PURPOSE:To pick up a semiconductor chip to be picked up by means of a collect without giving any damage on the chip by detecting the chip with a holder having an extremely simple structure so that no interference may take place between the reflected light rays from the semiconductor chip to be detected and from its surrounding chips. CONSTITUTION:A film 3 to which a semiconductor substrate divided into semiconductor chips 1a, 1b, etc., is stuck is placed on the top of a holder provided with a slant surface 2a around its central part and a space 2b through which air can pass at its central part and the semiconductor substrate is irradiated by light rays. Only the reflected light rays from one of the chip 1a to be detected is made incident to the visual field of a TV camera 4 and binarized on a display. Then the space 2b at the central part of the holder 2 is evacuated to vacuum and the chip 1a is removed from the film 3 except the peripheral portion. Thereafter, the peripheral portion of the chip 1a is removed from the film 3 by introducing high-pressure air to the space 2b at the central part of the holder 2 and a collet 5 is caused to hold the chip 1a by suction.</p> |
