发明名称 Compositions of platinum and rhodium catalyst in combination with hydrogen silsesquioxane resin
摘要 This invention relates to materials produced by diluting in a solvent a platinum or rhodium catalyzed preceramic mixture of a hydrogen silsesquioxane resin. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO2 coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.
申请公布号 US4898907(A) 申请公布日期 1990.02.06
申请号 US19880263206 申请日期 1988.10.27
申请人 DOW CORNING CORPORATION 发明人 HALUSKA, LOREN A.;MICHAEL, KEITH W.;TARHAY, LEO
分类号 C04B41/50;C04B41/52;H01L21/312;H01L21/314;H01L21/316;H01L21/56;H01L23/29 主分类号 C04B41/50
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