发明名称 |
Compositions of platinum and rhodium catalyst in combination with hydrogen silsesquioxane resin |
摘要 |
This invention relates to materials produced by diluting in a solvent a platinum or rhodium catalyzed preceramic mixture of a hydrogen silsesquioxane resin. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO2 coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices. |
申请公布号 |
US4898907(A) |
申请公布日期 |
1990.02.06 |
申请号 |
US19880263206 |
申请日期 |
1988.10.27 |
申请人 |
DOW CORNING CORPORATION |
发明人 |
HALUSKA, LOREN A.;MICHAEL, KEITH W.;TARHAY, LEO |
分类号 |
C04B41/50;C04B41/52;H01L21/312;H01L21/314;H01L21/316;H01L21/56;H01L23/29 |
主分类号 |
C04B41/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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