发明名称 MANUFACTURE OF RESIN SEALED TYPE SEMICONDUCTOR DEVICE
摘要 PURPOSE:To avoid deterioration of reliability of semiconductor element due to moisture penetration and prevent occurrence of cracks in a pellet and a resin by using a lead frame having no island and wire-bonding the semiconductor element to the lead. CONSTITUTION:A peripheral sheet 11 of a pellet 12a located at a predetermined position is fixed to a sheet suction stage 13, and a lead frame 10 having no island is set so that a notch surrounded by leads 2 thereof is positioned above a nozzle 15. Then the pellet lifting nozzle 15 is raised to insert the pellet 12 into the notch of the lead frame 10 and raise it to a predetermined bonding height. Then, after positionally correcting the misregistration amount between each lead 2 of the islandless lead frame 10 and each electrode terminal of the pellet 12a, the electrode terminals of the pellet 12a and the leads of the lead frame 10 are connected through wires 6 by wire bonding and the sheet 11 is removed from the semiconductor element subjected to the bonding.
申请公布号 JPH0235745(A) 申请公布日期 1990.02.06
申请号 JP19880186173 申请日期 1988.07.26
申请人 NEC CORP 发明人 IKEDA FUMIMARO
分类号 H01L21/60 主分类号 H01L21/60
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